Valonix builds ultra high purity diaphragm valves, high pressure gas valves, check valves and manifold panels for semiconductor fabs, photovoltaic lines and laboratories. Browse the range below.
Real models with port sizes, pressure ratings and Cv shown up front. Filter by family or open the full catalog.
VX4-LPVX4H-HPVX8-LP
VT423
CV20L
VMU
VX8H-HP
VX12-LP
VX16-LP
VP20
VB-HP
VB8
VB4
VMG
BI
B3H
BVI
B3W
BW
CW
CH
CV
NV
RV
WRV
UCV20
CV20AA specialty gas valve is only as clean as its weakest manufacturing step. We specify low-inclusion 316L VIM/VAR bodies, electropolished wetted surfaces, metal diaphragm or bellows isolation and helium leak testing as a single package.
A practical selection guide for specialty gas valves: gas compatibility, pressure, Cv
Compare UHP diaphragm valves and bellows sealed valves for specialty gas: dead volume
How helium mass spectrometer leak testing is specified for UHP valves: inboard versus
What VIM/VAR refining changes in 316L stainless steel used for ultra high purity valve
Compare VCR face seals and compression fittings for specialty gas lines: leak integrity
Understand Cv in UHP diaphragm valves: how seat size changes flow
UHP diaphragm valves, regulators and VMB panels for semiconductor fab gas delivery: silane, NF3, NH3, HCl and dopant gas
High purity valves for photovoltaic cell lines: silane, ammonia and nitrous oxide delivery for PECVD, diffusion and thin
UHP valves for MOCVD and LED production: metal-organic precursor lines, ammonia, hydrides and carrier hydrogen with fast
High purity valves for GC, ICP, mass spectrometry and calibration gas systems: low dead volume, fine metering and reliab
High pressure valves for hydrogen storage, tube trailers and fuel cell test stands: 20 MPa service, low leak rate, manua
Valve selection for SiH4, NH3, HCl, Cl2 and NF3: bellows sealed and diaphragm valves, compatible alloys, normally closed
Valves for cylinder cabinets, gas yards and bulk distribution: cylinder valves, high pressure isolation, regulators, cha
A specialty gas valve is a shut-off, switching or flow-control valve built for high purity, corrosive, toxic or pyrophoric gases. Compared with a general industrial valve it uses low-inclusion stainless steel, a metal diaphragm or bellows seal, electropolished wetted surfaces, helium leak testing and cleanroom packaging.
A UHP diaphragm valve is the standard choice: the metal diaphragm isolates the actuator from the gas path, internal volume is low, and there is no stem packing to outgas.
Specialty gases are supplied at high purity or are reactive, corrosive, toxic or pyrophoric. Their delivery systems need far tighter leak, cleanliness and material controls than bulk industrial gases such as nitrogen or compressed air.
Yes. Most valve families are available with a manual handwheel or a normally closed pneumatic actuator. Pneumatic versions generally carry a lower maximum pressure rating than the manual version.
VCR face seals, orbital butt weld, compression fittings and threaded or CGA/DISS cylinder connections, depending on the model.
We will confirm the valve type, wetted materials, end connections and actuation for your line.
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