Specialty Gas Valve Applications
Different gases and processes impose different requirements on valves. These guides cover the valve types, materials and safe-state logic used in each industry.
Semiconductor Fab Gas Delivery
UHP diaphragm valves, regulators and VMB panels for semiconductor fab gas delivery: silane, NF3, NH3
Photovoltaic & Solar Cell Manufacturing
High purity valves for photovoltaic cell lines: silane, ammonia and nitrous oxide delivery for PECVD, diffusion and thin-film deposition.
MOCVD & LED Process Gas
UHP valves for MOCVD and LED production: metal-organic precursor lines, ammonia, hydrides and carrier hydrogen with fast purge switching.
Laboratory & Analytical Instrument Gas
High purity valves for GC, ICP, mass spectrometry and calibration gas systems: low dead volume
Hydrogen & Fuel Cell High Pressure Valves
High pressure valves for hydrogen storage, tube trailers and fuel cell test stands: 20 MPa service, low leak rate
Corrosive & Toxic Specialty Gases
Valve selection for SiH4, NH3, HCl, Cl2 and NF3: bellows sealed and diaphragm valves, compatible alloys, normally closed safe state.
Cylinder Cabinets & Bulk Gas Distribution
Valves for cylinder cabinets, gas yards and bulk distribution: cylinder valves, high pressure isolation, regulators