Specialty Gas Regulators
A specialty gas regulator steps cylinder or header pressure down to a stable delivery pressure without adding contamination. Valonix regulators use a 316L or Hastelloy diaphragm, a metal-to-metal seat and a high purity flow path designed for low internal volume.
They are installed downstream of the cylinder valve and upstream of the UHP diaphragm valves that isolate individual branches, making them the pressure-control centre of a gas cabinet or panel.
Single stage versus two stage
A single stage regulator is compact and adequate when inlet pressure is fairly constant. A two stage unit holds delivery pressure more steadily as the cylinder empties, which matters for analytical instruments, MOCVD processes and any tool with tight flow tolerances.
- Single stage: compact, stable inlet pressure
- Two stage: stable delivery across cylinder decay
- Panel and cylinder mounting options
Inlet and outlet ranges
High purity models accept 500-3500 PSI inlet with outlet ranges from 0-30 up to 0-250 PSI. High pressure piston-sensed models accept 4500-6000 PSI inlet and deliver up to 3000 PSI. High flow bodies use 3/4 in connections for bulk distribution.
- Inlet 500-3500 PSI / high pressure to 6000 PSI
- Outlet 0-15, 0-30, 0-60, 0-100, 0-150, 0-250 PSI
- High flow bodies with 3/4 in ports
Diaphragm material and gas compatibility
Hastelloy diaphragms are selected for corrosive gases; 316L is standard for general high purity service. Always declare the gas, concentration and whether the system sees vacuum, because some elastomers and diaphragm materials are incompatible with halides and hydrides.
- Hastelloy or 316L diaphragm
- Declare gas and concentration
- Vacuum service must be stated
Valves in this category
Configured to order
These assemblies are configured from a P&ID, gas list and interlock philosophy. Send us your requirements.
Typical specifications
| Type | Single stage / two stage / piston sensed |
|---|---|
| Inlet pressure | 500-6000 PSI |
| Outlet ranges | 0-15 to 0-3000 PSI |
| Diaphragm | Hastelloy or 316L |
| Body | 316L stainless steel |
| Ports | 1/4 NPT, 3/4", VCR options |
Frequently Asked Questions
Do I need a two stage regulator?
If the tool is sensitive to delivery pressure drift as the cylinder empties, choose two stage. For short distribution lines with stable inlet pressure, single stage is usually enough.
Which diaphragm material for corrosive gas?
Hastelloy is typically selected for corrosive halide service; confirm the exact gas with our engineering team.
Can regulators be panel mounted?
Yes. Panel-mount and cylinder-mount configurations are both available.