Photovoltaic & Solar Cell Manufacturing
Photovoltaic cell production uses large volumes of silane, ammonia, nitrous oxide and nitrogen across PECVD, diffusion and thin-film deposition tools. Line sizes are often larger than in semiconductor fabs, so flow capacity and pressure stability matter as much as ultimate purity.
Valonix supplies high flow UHP diaphragm valves, regulators and check valves for these distribution systems, with butt-weld and face-seal ends to suit both permanent headers and serviceable tool connections.
High flow distribution
Solar lines commonly run 1/2 through 1 in distribution headers. A Cv 0.70 valve on a branch and a Cv 2.8-3.5 valve on a header keep pressure drop low while retaining a clean, purgeable flow path.
- Cv 0.70-0.80 branch valves
- Cv 2.8-3.5 header valves
- 1/2 to 1 in VCR and butt weld ports
Silane safety
Silane is pyrophoric. Panels should use normally closed pneumatic valves, dedicated purge legs, check valves on the purge supply and interlocked vent paths. Valve position feedback lets the control system prove the safe state before a process step begins.
- Normally closed pneumatic isolation
- Interlocked purge and vent
- Position feedback for the control system
Cost per line without losing cleanliness
PV fabs run many parallel lines, so valve count is high. Using one valve family across sizes simplifies spares, reduces qualification effort and keeps the wetted standard consistent across the whole plant.
- One valve family across all sizes
- Common spares and maintenance procedure
- Consistent wetted material standard
Recommended valve families
UHP Diaphragm Valves
Ultra high purity diaphragm valves for specialty gas delivery. 316L VIM/VAR bodies
High Purity Check Valves
High purity check valves and non-return valves for specialty gas systems
Specialty Gas Regulators
High purity and high pressure specialty gas regulators, single and two stage, 600-6000 PSI inlet
Frequently Asked Questions
What size valves do PV silane lines use?
Typically 1/2 in branches and 3/4 to 1 in headers, with Cv 0.70-3.5 depending on flow demand.
Are diaphragm valves suitable for silane?
Yes, with normally closed pneumatic actuation, an interlocked purge leg and a compatible seat material.