Gas Valve Manifolds & VMB
A gas valve manifold brings cylinder isolation, pressure regulation, process delivery, purge and vent into one controlled assembly. Valve manifold boxes (VMB) and valve manifold panels (VMP) are the standard way to distribute a specialty gas from a source to multiple tools while keeping purge sequences and interlocks in one place.
Valonix builds these assemblies around UHP diaphragm valves, high purity regulators, check valves and three-way switching valves, so the wetted components share one cleanliness standard.
Automatic changeover
Dual-cylinder changeover systems switch from the duty to the standby cylinder without interrupting tool supply. Pressure sensing triggers the switch, and a purge sequence clears the switched leg before it is brought online. Continuous supply is essential for fab tools where an unplanned gas interruption scraps a wafer batch.
- Duty / standby cylinder switching
- Automatic or manual changeover
- Purge before bringing the new leg online
Anatomy of a VMB / VMP
A typical panel contains a cylinder connection, a high pressure isolation valve, a regulator, a process diaphragm valve, a purge diaphragm valve, a vent check valve and a three-way switching valve. Interlocks enforce the order of operations and prove valve position before process gas is admitted.
- Isolation, regulation, process, purge and vent valves
- Interlocked purge and vent sequencing
- Position feedback on actuated valves
Design inputs we need
To configure a manifold we need the gas list, number of sources and outlets, delivery pressure, flow demand, purge scheme, available instrument air and the site's safety/interlock philosophy. Providing these up front avoids rework on panels that are already welded.
- Gas list and concentrations
- Source and outlet counts
- Delivery pressure and flow
- Interlock and ESD philosophy
Valves in this category
Configured to order
These assemblies are configured from a P&ID, gas list and interlock philosophy. Send us your requirements.
Typical specifications
| Panel types | VMB, VMP, changeover, secondary panel |
|---|---|
| Core valves | UHP diaphragm, three-way, check |
| Pressure control | Single / two stage regulators |
| Actuation | Pneumatic normally closed |
| Purge | Interlocked process / purge / vent |
| Documentation | P&ID, leak test and BOM |
Frequently Asked Questions
What is the difference between a VMB and a VMP?
A VMB (valve manifold box) is an enclosed cabinet; a VMP (valve manifold panel) is an open or frame-mounted panel. Both perform the same distribution and purge functions.
Can you build to our P&ID?
Yes. Share the P&ID, gas list and interlock requirements and the panel can be configured accordingly.
Do you supply documentation?
P&ID, bill of materials, leak test records and material certificates can be provided with the panel.